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CHIPS Incentives Program – Facilities for Semiconductor Materials and Manufacturing Equipment

National Institute of Standards and Technology · 2023-NIST-CHIPS-SMME-01

Award range

See source for award amount

Deadline

2026-11-01-00-00-00

Confirm exact timezone in the announcement.
Eligible applicants

Others (see text field entitled "Additional Information on Eligibility" for clarification)

Geographic eligibility and all attachment-specific conditions require review of the original announcement.

Eligibility details

An applicant must be a “covered entity” to receive CHIPS Incentives. For purposes of this NOFO, a “covered entity” means a nonprofit entity; a private-sector entity; a consortium of private-sector entities; or a consortium of nonprofit, public, and private-sector entities with a demonstrated ability to substantially finance, construct, expand, or modernize a facility relating to the fabrication, assembly, testing, advanced packaging, production, or research and development of semiconductors, materials used to manufacture semiconductors or semiconductor manufacturing equipment.

Matching funds & resources

Source matching-funds field: Not Required.

Matching funds and leveraged resources are different requirements. Read the description and reviewed rules below before determining resource commitments.

About this opportunity

The CHIPS Incentives Program aims to catalyze long-term economically sustainable growth in the domestic semiconductor industry in support of U.S. economic and national security. This is the second Notice of Funding Opportunity under this program and seeks applications for projects for the construction, expansion, or modernization of commercial facilities for semiconductor materials and manufacturing equipment. For more information, additional resources, and instructions on how to apply, please visit chips.gov. Note that all applications must be submitted through the CHIPS Incentives Portal at https://applications.chips.gov . If you have any questions on how to apply, please email apply@chips.gov.

Funding geography: Not specified — review source. A funder’s address does not establish eligibility.

Review original source ↗

Funding instrument: Cooperative Agreement. Issuing jurisdiction: Federal. This is not a geographic eligibility determination.

Source fields and evidence

id: 350338
Source ↗ · id

opportunityNumber: 2023-NIST-CHIPS-SMME-01
Source ↗ · opportunityNumber

opportunityTitle: CHIPS Incentives Program – Facilities for Semiconductor Materials and Manufacturing Equipment
Source ↗ · opportunityTitle

revision: 2
Source ↗ · revision

agencyDetails: {"code":"NIST","seed":"DOC-NIST","agencyName":"National Institute of Standards and Technology","agencyCode":"DOC-NIST","topAgencyCode":"DOC"}
Source ↗ · agencyDetails

owningAgencyCode: DOC-NIST
Source ↗ · owningAgencyCode

cfdas: [{"id":414430,"opportunityId":350338,"cfdaNumber":"11.037","programTitle":"CHIPS Incentives Program"}]
Source ↗ · cfdas

applicantTypes: [{"id":"25","description":"Others (see text field entitled \"Additional Information on Eligibility\" for clarification)"}]
Source ↗ · applicantTypes

applicantEligibilityDesc: An applicant must be a “covered entity” to receive CHIPS Incentives. For purposes of this NOFO, a “covered entity” means a nonprofit entity; a private-sector entity; a consortium of private-sector entities; or a consortium of nonprofit, public, and private-sector entities with a demonstrated ability to substantially finance, construct, expand, or modernize a facility relating to the fabrication, assembly, testing, advanced packaging, production, or research and development of semiconductors, materials used to manufacture semiconductors or semiconductor manufacturing equipment.
Source ↗ · applicantEligibilityDesc

fundingInstruments: [{"id":"CA","description":"Cooperative Agreement"}]
Source ↗ · fundingInstruments

fundingActivityCategories: [{"id":"ST","description":"Science and Technology and other Research and Development"}]
Source ↗ · fundingActivityCategories

awardFloor: none
Source ↗ · awardFloor

awardCeiling: none
Source ↗ · awardCeiling

responseDate: Nov 01, 2026 12:00:00 AM EDT
Source ↗ · responseDate

responseDateStr: 2026-11-01-00-00-00
Source ↗ · responseDateStr

costSharing: false
Source ↗ · costSharing

lastUpdatedDate: Oct 16, 2025 06:17:20 PM EDT
Source ↗ · lastUpdatedDate

status: posted
Source ↗ · oppHits[id=350338].oppStatus

Related collections: Research funding opportunities ·

Source retrieved 10/17/2026 · Revision 2. Always confirm current requirements and dates with the funder. Structured source fields are checked; this is not a determination that every applicant qualifies.

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